Simple method of fabricating polarisation-insensitive and very low crosstalk AWG grating devices

被引：33

作者：

Ojha, SM ^{[1
]}

Cureton, C ^{[1
]}

Bricheno, T ^{[1
]}

Day, S ^{[1
]}

Moule, D ^{[1
]}

Bell, AJ ^{[1
]}

Taylor, J ^{[1
]}

机构：

[1] Nortel PLC, Adv Technol, Harlow Labs, Harlow CM17 9NA, Essex, England

来源：

ELECTRONICS LETTERS | 1998年 / 34卷 / 01期

关键词：

D O I：

10.1049/el:19980079

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A simple method of fabricating polarisation insensitive and very low crosstalk dense-WDM devices has been developed. The matching of the thermal coefficient of expansion (TCE) of the overcladding layer to the silicon substrate, for a 16 channel arrayed-waveguide demultiplexer, resulted in very low polarisation sensitivity (0.03nm). The TCE of the undercladding and the core layers, on the other hand, were found to have negligible effect on the polarisation sensitivity. PECVD was used for depositing all the oxide layers.

引用

页码：78 / 79

页数：2

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