Characterization of Ag-doped vanadium oxide (AgxV2O5) thin film for cathode of thin film battery

被引:36
作者
Hwang, HS
Oh, SH
Kim, HS
Cho, WI [1 ]
Cho, BW
Lee, DY
机构
[1] Korea Inst Sci & Technol, Econano Res Ctr, Seoul 130650, South Korea
[2] Korea Univ, Div MSE, Seoul 136701, South Korea
关键词
silver co-sputtering; amorphous vanadium oxide; cathode; thin film battery;
D O I
10.1016/j.electacta.2004.04.050
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
The effect of silver co-sputtering on the characteristics of amorphous V2O5 films, grown by dc reactive sputtering, is investigated. The co-sputtering process influences the growth mechanism as well as the characteristics of the V2O5 films. X-ray diffraction (XRD), Inductively coupled plasma-atomic emission spectrometry (ICP-AES), field emission-scanning electron microscopy (FE-SEM), Fourier transform infrared spectrometry (FT-IR) and X-ray photoelectron spectrometry (XPS) results indicate that the microstructure of the V2O5 films is affected by the rf power of the co-sputtered silver. In addition, an all-solid-state thin film battery with full cell structure of Li/LiPON/AgxV2O5/Pt has been fabricated. It is found that the silver co-sputtered V2O5 cathode film exhibits better cycle performance than an undoped one. (C) 2004 Elsevier Ltd. All rights reserved.
引用
收藏
页码:485 / 489
页数:5
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