共 6 条
[1]
Arndt R. A., 1975, P 11 IEEE PHOT SPEC, P40
[3]
KING DL, 1991, P 22 IEEE PHOT SPEC, P303
[4]
Vázsonyi É, 2003, J MICROMECH MICROENG, V13, P165, DOI 10.1088/0960-1317/13/2/301
[6]
WOLF S, 1986, SILICON PROCESSING V, V1, P516