Capacitive sensor of absolute coordinate

被引：1

作者：

Madorsky, AV ^{[1
]}

Repkov, VV ^{[1
]}

机构：

[1] Budker Inst Nucl Phys, Novosibirsk 630090, Russia

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1998年 / 405卷 / 2-3期

关键词：

D O I：

10.1016/S0168-9002(96)01052-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A capacitive sensor of absolute coordinate with 100 mm range, 10 mu m accuracy and 1 mu m resolution has been developed. The measuring structure is manufactured using standard Printed Circuit Board Technology.

引用

页码：279 / 281

页数：3