New crystallization kinetics of phase change of Ge2Sb2Te5 at moderately elevated temperature

被引:10
作者
An, SH [1 ]
Kim, DY
Kim, SY
机构
[1] Ajou Univ, Dept Phys, Suwon 442749, South Korea
[2] Ajou Univ, Dept Mol Sci & Technol, Suwon 442749, South Korea
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2002年 / 41卷 / 12期
关键词
Ge-Sb-Te; crystallization; phase change; ellipsometry; JMA equation; nucleation;
D O I
10.1143/JJAP.41.7400
中图分类号
O59 [应用物理学];
学科分类号
摘要
Based on the ellipsometric observation of the phase change of stoichiometric Ge-Sb-Te at moderately elevated temperature, we find that the kinetics of crystallization of Ge-Sb-Te is described by the modified Johnson-Mehl-Avrami (JMA) equation, which implies that the first stage of cascaded crystallization of Ge-Sb-Te is a true nucleation-dominated process such that the formation of nuclei is stimulated by preexisting nuclei.
引用
收藏
页码:7400 / 7401
页数:2
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