Solid-state graphitization mechanisms of silicon carbide 6H-SiC polar faces

被引:100
作者
Forbeaux, I [1 ]
Themlin, JM [1 ]
Charrier, A [1 ]
Thibaudau, F [1 ]
Debever, JM [1 ]
机构
[1] Univ Mediterranee, Fac Sci Luminy, UMR CNRS 6631, Grp Phys Etats Condenses, F-13288 Marseille 9, France
关键词
silicon carbide; surface electronic phenomena; graphite; inverse photoemission; growth; silicon; diffusion and migration; low-energy electron diffraction;
D O I
10.1016/S0169-4332(00)00224-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Due to the higher vapour pressure of silicon, silicon carbide surfaces annealed at high temperature under vacuum tend to graphitize. The comparison of graphite formation on the silicon and carbon terminations of 6H-SiC reveals significant differences in the graphitization mechanisms involved. The conduction-band structure of these interfaces has been determined by angle-resolved inverse photoemission spectroscopy (KRIPES). Although the graphite layers grown on the C face are essentially polycrystalline, a small fraction of the film keeps a preferred orientation, where the graphite lattice basis vectors are rotated by 30 degrees with respect to the basis vectors of the SiC lattice as in the case of the Si face. This in-plane disorder is in contrast with the growth of graphite on the Si face that takes place on a "passivated" adatom-terminated surface, leading to single-crystalline, heteroepitaxial graphite growth. The observation of unshifted pi* states indicates a very small interaction of the first graphite monolayer with the Si face. In contrast, KRIPES reveals that the first graphite layer is strongly bound to the C face. A rehybridization of the graphite pi* states with occupied orbitals of the substrate: is inferred from an observed increase in the density of states in the vicinity of the Fermi level. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:406 / 412
页数:7
相关论文
共 29 条
  • [1] ADSORPTION AND COADSORPTION OF BORON AND OXYGEN ON ORDERED ALPHA-SIC SURFACES
    BERMUDEZ, VM
    [J]. APPLIED SURFACE SCIENCE, 1995, 84 (01) : 45 - 63
  • [2] SCANNING TUNNELING MICROSCOPY AND SPECTROSCOPY OF CUBIC BETA-SIC(111) SURFACES
    CHANG, CS
    TSONG, IST
    WANG, YC
    DAVIS, RF
    [J]. SURFACE SCIENCE, 1991, 256 (03) : 354 - 360
  • [3] 1ST-PRINCIPLES STUDY OF THE ELECTRONIC-PROPERTIES OF GRAPHITE
    CHARLIER, JC
    GONZE, X
    MICHENAUD, JP
    [J]. PHYSICAL REVIEW B, 1991, 43 (06): : 4579 - 4589
  • [4] CONDUCTION-BAND STRUCTURE OF GRAPHITE SINGLE-CRYSTALS STUDIED BY ANGLE-RESOLVED INVERSE PHOTOEMISSION AND TARGET-CURRENT SPECTROSCOPY
    CLAESSEN, R
    CARSTENSEN, H
    SKIBOWSKI, M
    [J]. PHYSICAL REVIEW B, 1988, 38 (17): : 12582 - 12588
  • [5] UNOCCUPIED ELECTRONIC STATES OF SINGLE-CRYSTAL GRAPHITE BY ANGLE-RESOLVED ULTRAVIOLET INVERSE PHOTOEMISSION
    COLLINS, IR
    ANDREWS, PT
    LAW, AR
    [J]. PHYSICAL REVIEW B, 1988, 38 (18): : 13348 - 13354
  • [6] Heteroepitaxial graphite on 6H-SiC(0001):: Interface formation through conduction-band electronic structure
    Forbeaux, I
    Themlin, JM
    Debever, JM
    [J]. PHYSICAL REVIEW B, 1998, 58 (24): : 16396 - 16406
  • [7] FORBEAUX I, UNPUB
  • [8] Electronic and atomic structure of the 6H-SiC(0001) surface studied by ARPES, LEED, and XPS
    Hollering, M
    Bernhardt, J
    Schardt, J
    Ziegler, A
    Graupner, R
    Mattern, B
    Stampfl, APJ
    Starke, U
    Heinz, K
    Ley, L
    [J]. PHYSICAL REVIEW B, 1998, 58 (08) : 4992 - 5000
  • [9] Morphology and atomic structure of the SiC(000(1)over-bar)3x3 surface reconstruction
    Hoster, HE
    Kulakov, MA
    Bullemer, B
    [J]. SURFACE SCIENCE, 1997, 382 (1-3) : L658 - L665
  • [10] A core level and valence band photoemission study of 6H-SIC(000(1)over-bar)
    Johansson, LI
    Glans, PA
    Hellgren, N
    [J]. SURFACE SCIENCE, 1998, 405 (2-3) : 288 - 297