Preparation of multi-coating PZT thick films by sol-gel method onto stainless steel substrates

被引：52

作者：

Seveno, R ^{[1
]}

Limousin, P ^{[1
]}

Averty, D ^{[1
]}

Chartier, JL ^{[1
]}

Le Bihan, R ^{[1
]}

Gundel, HW ^{[1
]}

机构：

[1] Univ Nantes, Lab Phys Isolants & Optron, Equipe Phys Solides Elect, EA 2158, F-44322 Nantes 03, France

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 2000年 / 20卷 / 12期

关键词：

ferroelectric properties; PZT; sol-gel process; substrates; thick films;

D O I：

10.1016/S0955-2219(00)00095-9

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

PbZr0.45Ti0.55O3 ferroelectric films have been prepared by sol-gel method, using alkoxide precursor compounds and multi-layer technique. The gel films were deposited by spin-coating onto stainless steel substrates. In order to obtain crystallization in the perovskite phase, the samples were annealed at 600-700 degrees C for 1 min. The dependence of the electric properties on the heat-treatment temperature is studied, and the coercive electric field as a function of the material thickness is determined. By SEM photography, the microstructure of the films could be shown to be homogeneous. (C) 2000 Elsevier Science Ltd. All rights reserved.

引用

页码：2025 / 2028

页数：4

共 10 条

[1] DEPOSITION OF THIN-FILMS OF PZT BY A FOCUSED ION-BEAM SPUTTERING TECHNIQUE [J].