Mechanical mixing in nonlinear nanomechanical resonators

被引：81

作者：

Erbe, A

Krömmer, H

Kraus, A

Blick, RH

Corso, G

Richter, K

机构：

[1] Univ Munich, Ctr Nanosci, D-80539 Munich, Germany

[2] Univ Munich, Sekt Phys, D-80539 Munich, Germany

[3] Max Planck Inst Phys Komplexer Syst, D-01187 Dresden, Germany

来源：

APPLIED PHYSICS LETTERS | 2000年 / 77卷 / 19期

关键词：

D O I：

10.1063/1.1324721

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The physics of nonlinear dynamics has been studied in detail in macroscopic mechanical systems like the driven classical pendulum. By now, it is possible to build mechanical devices on the nanometer scale with eigenfrequencies on the order of several 100 MHz. In this work, we want to present how to machine such nanomechanical resonators out of silicon-on-insulator wafers and how to operate them in the nonlinear regime in order to investigate higher-order mechanical mixing at radio frequencies. The nonlinear response then is compared in detail to nth-order perturbation theory and nonperturbative numerical calculations. (C) 2000 American Institute of Physics. [S0003-6951(00)04545-9].

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页码：3102 / 3104

页数：3

相关论文

共 10 条

[1] Measurement of nanomechanical resonant structures in single-crystal silicon [J].

Carr, DW ;

Sekaric, L ;

Craighead, HG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (06) :3821-3824

[2] Fabrication of nanoelectromechanical systems in single crystal silicon using silicon on insulator substrates and electron beam lithography [J].

Carr, DW ;

Craighead, HG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (06) :2760-2763

[3] Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals [J].

Cleland, AN ;

Roukes, ML .

APPLIED PHYSICS LETTERS, 1996, 69 (18) :2653-2655

[4] A mechanically flexible tunneling contact operating at radio frequencies [J].

Erbe, A ;

Blick, RH ;

Tilke, A ;

Kriele, A ;

Kotthaus, JP .

APPLIED PHYSICS LETTERS, 1998, 73 (25) :3751-3753

[5] EVADING AMPLIFIER NOISE IN NONLINEAR OSCILLATORS [J].

GREYWALL, DS ;

YURKE, B ;

BUSCH, PA ;

PARGELLIS, AN ;

WILLETT, RL .

PHYSICAL REVIEW LETTERS, 1994, 72 (19) :2992-2995

[6] Nanomechanical resonators operating as charge detectors in the nonlinear regime [J].

Krömmer, H ;

Erbe, A ;

Tilke, A ;

Manus, S ;

Blick, RH .

EUROPHYSICS LETTERS, 2000, 50 (01) :101-106

[7]

Nayfeh A.H., 1995, NONLINEAR OSCILLATIO, DOI DOI 10.1002/9783527617586

[8] SUPERSTRUCTURE IN THE BIFURCATION SET OF THE DUFFING EQUATION X+DX+X+X3=FCOS(W)T) [J].

PARLITZ, U ;

LAUTERBORN, W .

PHYSICS LETTERS A, 1985, 107 (08) :351-355

[9] Suspending highly doped silicon-on-insulator wires for applications in nanomechanics [J].

Pescini, L ;

Tilke, A ;

Blick, RH ;

Lorenz, H ;

Kotthaus, JP ;

Eberhardt, W ;

Kern, D .

NANOTECHNOLOGY, 1999, 10 (04) :418-420

[10] MECHANICAL PARAMETRIC AMPLIFICATION AND THERMOMECHANICAL NOISE SQUEEZING [J].

RUGAR, D ;

GRUTTER, P .

PHYSICAL REVIEW LETTERS, 1991, 67 (06) :699-702