Neutral bremsstrahlung measurement in an atmospheric-pressure radio frequency discharge

被引:63
作者
Park, J [1 ]
Henins, I [1 ]
Herrmann, HW [1 ]
Selwyn, GS [1 ]
机构
[1] Los Alamos Natl Lab, Plasma Phys Lab, Los Alamos, NM 87545 USA
关键词
D O I
10.1063/1.874220
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Neutral bremsstrahlung emission spectrum is measured in an atmospheric-pressure radio frequency (rf) capacitive discharge for a gas mixture of helium (99.5%) and oxygen (0.5%) using a high resolution triple monochromator between 450 and 1000 nm. Good agreement is obtained for spectral variation and absolute intensity between the observed neutral bremsstrahlung and theoretical emissivity calculated using electron-neutral momentum cross sections. Based on a theoretical fitting, the discharge is characterized by a time averaged electron density of 2.9x10(11) cm(-3) and an electron temperature of 1.9 eV for an input power density of 28 W/cm(3). (C) 2000 American Institute of Physics. [S1070-664X(00)03808-8].
引用
收藏
页码:3141 / 3144
页数:4
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