Diagnostics of the electronegative plasma sheath at low pressures using microparticles

被引:48
作者
Annaratone, BM [1 ]
Antonova, T [1 ]
Thomas, HM [1 ]
Morfill, GE [1 ]
机构
[1] Max Planck Inst Extraterr Phys, Ctr Interdisciplinary Plasma Sci, D-85740 Garching, Germany
关键词
D O I
10.1103/PhysRevLett.93.185001
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Levitated particles are a new powerful diagnostic of the midplasma sheath region. They can reveal features undetectable either to plasma or to surface measurements. The equilibrium position of microparticles suspended in an oxygen plasma sheath, together with a model of the levitation force and Langmuir probe measurements, gives evidence of secondary electropositive plasmas in the already established plasma sheath, in the range of parameters where the modified Bohm criterion breaks down into multiple solutions.
引用
收藏
页码:185001 / 1
页数:4
相关论文
共 16 条
[1]   A note on the Bohm criterion for electronegative gases [J].
Allen, JE .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2004, 13 (01) :48-49
[2]   The double sheath associated with electron emission into a plasma containing negative ions [J].
Amemiya, H ;
Annaratone, BM ;
Allen, JE .
JOURNAL OF PLASMA PHYSICS, 1998, 60 :81-93
[3]   The collection of positive sons by spherical and cylindrical probes in an electronegative plasma [J].
Amemiya, H ;
Annaratone, BM ;
Allen, JE .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1999, 8 (01) :179-190
[4]   BOUNDARIES AND PROBES IN ELECTRONEGATIVE PLASMAS [J].
BRAITHWAITE, NS ;
ALLEN, JE .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1988, 21 (12) :1733-1737
[5]   Kinetic model for a low-pressure discharge with negative ions [J].
Chabert, P ;
Sheridan, TE .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2000, 33 (15) :1854-1860
[6]   The plasma-wall boundary region in negative-ion-dominated plasmas at low pressures [J].
Franklin, RN .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2000, 9 (02) :191-198
[7]   The plasma-sheath boundary region [J].
Franklin, RN .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2003, 36 (22) :R309-R320
[8]  
HERZBERG G, 1983, MOL SPECTRA MOL STRU, V1
[9]   The plasma-sheath boundary near the adaptive electrode as traced by particles [J].
Annaratone, BM ;
Glier, M ;
Stuffler, T ;
Raif, M ;
Thomas, HM ;
Morfill, GE .
NEW JOURNAL OF PHYSICS, 2003, 5 :92.1-92.12
[10]   NEGATIVE-IONS, OZONE, AND METASTABLE COMPONENTS IN DC OXYGEN GLOW-DISCHARGE [J].
KHVOROSTOVSKAYA, LE ;
YANKOVSKY, VA .
CONTRIBUTIONS TO PLASMA PHYSICS, 1991, 31 (01) :71-88