An automated self-marking phase-shifting system for measuring the full field phase distribution of interference fringe patterns

被引：6

作者：

Huang, MJ ^{[1
]}

Chou, LY ^{[1
]}

机构：

[1] Natl Chung Hsing Univ, Dept Mech Engn, Taichung 40227, Taiwan

来源：

OPTICS AND LASER TECHNOLOGY | 2000年 / 32卷 / 04期

关键词：

phase-shifting technique; PZT; optical wavefront measurement; zygo interferometer; PZT calibration;

D O I：

10.1016/S0030-3992(00)00046-3

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A technique based on the repetition of the interference fringe pattern for the automated marking of the PZT phase shifting interference system is described. A closed-loop control is used to circumvent the inherent hysteresis and nonlinear characteristics of PZT. The whole interference system integrated under LabVIEW graphic programming environment provides users a friendly and ease-of-maintenance interface. An application of the algorithm is used to demonstrate the promotion of the Zygo GPI-LC model interferometer to upgrade its phase resolution ability. (C) 2000 Elsevier Science Ltd. All rights reserved.

引用

页码：225 / 230

页数：6

共 12 条

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