Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses

被引：178

作者：

Kondo, T

Matsuo, S

Juodkazis, S

Mizeikis, V

Misawa, H

机构：

[1] Univ Tokushima, Dept Ecosyst Engn, Grad Sch Engn, Satellite Venture Business Lab, Tokushima 7708506, Japan

[2] Japan Sci & Technol Corp, CREST, Tokyo, Japan

来源：

APPLIED PHYSICS LETTERS | 2003年 / 82卷 / 17期

关键词：

D O I：

10.1063/1.1569987

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Femtosecond laser pulses are useful for laser microfabrication through multiphoton absorption. However, it is difficult to create interference of femtosecond pulses for the fabrication of periodic structures. In this letter, we report the fabrication of two-dimensional periodic structures by means of multibeam interference of femtosecond pulses. Scanning electron microscopy revealed a rod structure arranged into a square lattice. The possibility of controlling the period of the lattice, rod thickness, and rod shape were demonstrated. (C) 2003 American Institute of Physics.

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页码：2758 / 2760

页数：3

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