Controlled growth of periodic pillars by glancing angle deposition

被引：118

作者：

Dick, B ^{[1
]}

Brett, MJ

Smy, T

机构：

[1] Univ Alberta, Dept Elect & Comp Engn, Edmonton, AB T6G 2V4, Canada

[2] Carleton Univ, Dept Elect, Ottawa, ON K1S 5B6, Canada

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2003年 / 21卷 / 01期

关键词：

D O I：

10.1116/1.1529652

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

It has been shown that glancing angle deposition (GLAD) coupled with a prefabricated seed layer can be used to fabricate periodic microstructures. In this article, we show that the column competition effects inherent within aperiodic GLAD films can be delayed in periodic films due to the tendency of the film to achieve a preferred density at a given flux incidence angle. This technique, coupled with the use of the three-dimensional ballistic simulator, may allow for the design and use of periodic GLAD microstructures in such applications as magnetic pillars and three-dimensional photonic crystals. (C) 2003 American Vacuum Society.

引用

页码：23 / 28

页数：6

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