Investigation on the amorphous-crystalline transition and microstructure of sol-gel derived (Ba1-xSrx)TiO3 thin films

被引：27

作者：

Ding, YP

Jin, CY

Meng, ZY ^{[1
]}

机构：

[1] Jiao Tong Univ, Dept Mat Sci, Shanghai 200030, Peoples R China

[2] Shanghai Univ, Dept Mat Sci, Shanghai 201800, Peoples R China

来源：

MATERIALS RESEARCH BULLETIN | 2000年 / 35卷 / 07期

基金：

中国国家自然科学基金;

关键词：

thin films; sol-gel chemistry; phase transitions; microstructure;

D O I：

10.1016/S0025-5408(00)00315-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

(Ba1-xSrx)TiO3 (BST) ferroelectric thin films were fabricated by sol-gel processing, using Ba(Ac)(2), Sr(Ac)(2), and Ti(OC4H9)(4) as starting materials. Differential scanning calorimetry (DSC), backscattering scanning electronic microscopy (BS-SEM), and X-ray diffraction (XRD) were employed to investigate the effect of chelating agents on the phase formation characteristics and microstructure of the BST films. It was found that the chelating agents, acetate acid (HAc) and acetylacetone (HAcAc), changed the crystallization path from amorphous to crystalline phase during annealing. BS-SEM revealed that HAcAc improved the densification and compositional homogeneity in the microregion of the films. These phenomena were explained by the modified condensation property of the precursors. (C) 2000 Elsevier Science Ltd. All rights reserved.

引用

页码：1187 / 1193

页数：7

共 12 条

[1] Tunability and Calculation of the Dielectric Constant of Capacitor Structures with Interdigital Electrodes [J].