High-resolution imaging of recording marks on phase-change film by lateral force microscopy

被引：6

作者：

Ishiyama, O ^{[1
]}

机构：

[1] Matsushita Technores Inc, Characterizat Technol Grp, Moriguchi, Osaka 5708501, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2004年 / 43卷 / 9A期

关键词：

recording mark; phase-change; Ge-Sb-Te; scanning probe microscopy; lateral force microscopy; Kelvin force microscopy;

D O I：

10.1143/JJAP.43.6356

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Recording marks on a phase-change optical disk were observed by lateral force microscopy (LFM), and the images were compared with those obtained by Kelvin force microscopy (KFM). The spatial resolution of LFM was considerably better than that of KFM. Therefore it is expected that LFM will become one of the effective techniques for evaluating the shapes of recording marks in next-generation phase-change optical disks.

引用

页码：6356 / 6357

页数：2

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