Manganese-activated gallium oxide electroluminescent phosphor thin films prepared using various deposition methods

被引:59
作者
Miyata, T [1 ]
Nakatani, T [1 ]
Minami, T [1 ]
机构
[1] Kanazawa Inst Technol, Electron Device Syst Lab, Nonoichi, Ishikawa 9218501, Japan
关键词
thin film; electroluminescent device; Ga2O3 : Mn; oxide phosphor;
D O I
10.1016/S0040-6090(00)01123-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The luminescent properties of Ga2O3:Mn thin films prepared by magnetron sputtering or chemical methods such as solution coating and sol-gel techniques have been described. The electroluminescent characteristics were evaluated by thin-film electroluminescent (TFEL) devices using Ga2O3:Mn thin films as the emitting layer. The photoluminescent and electroluminescent characteristics were mainly correlated to the crystallographical properties of the thin-film emitting layer. A luminance of 13.5 cd/m(2) was obtained in a TFEL device using an as-deposited Ga2O3:Mn thin film prepared by magnetron sputtering when driven at 1 kHz. Luminances above 500 and 100 cd/m(2) were obtained in TFEL devices using annealed Ga2O3:Mn thin films regardless of the thin-film deposition techniques, when driven at 1 kHz and 60 Hz, respectively. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:145 / 149
页数:5
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