Thermal stability of PVD hard coatings

被引：105

作者：

Mitterer, C

Mayrhofer, PH

Musil, J

机构：

[1] Univ Min & Met Leoben, Dept Phys Met & Mat Testing, A-8700 Leoben, Austria

[2] Univ W Bohemia, Dept Phys, CZ-30614 Plzen, Czech Republic

[3] Mat Ctr Leoben, A-8700 Leoben, Austria

来源：

VACUUM | 2003年 / 71卷 / 1-2期

关键词：

hard coatings; thermal stability; microstructure; intrinsic stresses; recovery; recrystallization;

D O I：

10.1016/S0042-207X(02)00751-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Hard coatings deposited by physical vapour deposition based on the transition metal nitrides are nowadays widely applied to reduce tool wear. The aim of this paper is to show how microstructural parameters like grain size, stress and chemical and phase composition influence the thermal stability of different hard coatings. This is demonstrated using single-phase coatings like TiN, (Ti, Al, V)N and CrN as well as the dual-phase nanocomposite coatings CrN-Cr2N and TiN-TiB2. It is shown that the resistance against recovery and recrystallization can be improved by introducing a high density of phase boundaries, as is the case for nanocomposite coatings. (C) 2003 Elsevier Science Ltd. All rights reserved.

引用

页码：279 / 284

页数：6

共 24 条

[1] Overview no. 130 - Size effects in materials due to microstructural and dimensional constraints: A comparative review [J].