Production of silicon diaphragms by precision grinding

被引:7
作者
Prochaska, A [1 ]
Baine, PT [1 ]
Mitchell, SJN [1 ]
Gamble, HS [1 ]
机构
[1] Queens Univ Belfast, Sch Elect & Elect Engn, Belfast BT9 5AH, Antrim, North Ireland
来源
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY VI | 2000年 / 4174卷
关键词
silicon grinding; SOI; porous silicon; FEM analysis;
D O I
10.1117/12.396440
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
The application of precision grinding for silicon diaphragm formation is investigated. The test structures involved 6 mm diameter diaphragms with thickness in the range 25 mum - 150 mum. When grinding is performed without supporting the diaphragm, buckling occurs due to non-uniform removal of the silicon material over the diaphragm region. The magnitude of buckling depends on the final thickness of the diaphragm. Results obtained from using FEM analysis to determine deterioration in performance of the diaphragm performance due to buckling are presented. These results show a 10% reduction in performance for a 75 mum thick diaphragm with a buckling amplitude of 30 mum, but negligible reduction if the buckling is reduced to < 10<mu>m. It is shown that the use of a porous silicon support can significantly reduce the amount of buckling, by a factor of 4 in the case of 75 mum thick diaphragms. The use of SOI technology can also suppress or eliminate the buckling although this may be a less economical process.
引用
收藏
页码:244 / 255
页数:12
相关论文
共 9 条
[1]  
DENHARTOG JP, 1952, ADV STRENGHT MAT
[2]  
KAZUI Y, 1987, Patent No. 4670969
[3]   Design and development of a silicon microfabricated flow-through dispenser for on-line picolitre sample handling [J].
Laurell, T ;
Wallman, L ;
Nilsson, J .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1999, 9 (04) :369-376
[4]   The flow structure inside a microfabricated inkjet printhead [J].
Meinhart, CD ;
Zhang, HS .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2000, 9 (01) :67-75
[5]  
OLSSON A, 1997, J MICROELECTROMECHAN, V6
[6]  
PETERSEN K, 1979, IEEE T ELECT DEVICES, V26
[7]  
SADAHIRO K, 1991, Patent No. 0460437
[8]  
SAMAUN, 1971, THESIS STANFORD U
[9]   PIEZOELECTRIC CAPILLARY INJECTOR - NEW HYDRODYNAMIC METHOD FOR DOT PATTERN GENERATION [J].
STEMME, E ;
LARSSON, S .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1973, ED20 (01) :14-19