Replication of LIGA structures using microcasting

被引：21

作者：

Baumeister, G ^{[1
]}

Ruprecht, R ^{[1
]}

Hausselt, J ^{[1
]}

机构：

[1] Forschungszentrum Karlsruhe, D-76021 Karlsruhe, Germany

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2004年 / 10卷 / 6-7期

关键词：

Microstructured; Mold; Surface Roughness; Aspect Ratio; Cool Rate;

D O I：

10.1007/s00542-004-0377-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Microcasting with a gold base alloy and an Al-bronze as a replication technique for LIGA structures is shown. A LIGA mold insert for injection molding is used to produce PMMA patterns as lost wax models in the microcasting process. Although there are several steps of replication the accuracy of the process is high and allows the fast manufacturing of middle size batches of microstructured parts. The mechanical properties can be varied within a wide range by choosing different casting alloys or cooling rates. Additionally the influence of the investment on the surface roughness is presented as well as results of flowlength tests showing maximal achievable aspect ratios with the gold base alloy and the Al-bronze.

引用

页码：484 / 488

页数：5