Pulsed laser deposition of cobalt ferrite in a reactive O2:N2 atmosphere:: effect of the deposition pressure and temperature

被引:27
作者
Viart, N
Rebmann, G
Pourroy, G
Loison, JL
Versini, G
Huber, F
Ulhaq-Bouillet, C
Mény, C
Panissod, P
Saviot, L
机构
[1] Univ Strasbourg 1, CNRS, Inst Phys & Chim Mat Strasbourg, Grp Mat Inorgan,UMR 7504, F-67034 Strasbourg 2, France
[2] Univ Strasbourg 1, Inst Phys & Chim Mat Strasbourg, CNRS, Grp Opt Non Lineaire & Optoelect,UMR 7504, F-67034 Strasbourg, France
[3] Univ Strasbourg 1, CNRS, Inst Phys & Chim Mat Strasbourg, Grp Etude Mat Met,UMR 7504, F-67034 Strasbourg 2, France
[4] CNRS, Lab Rech React Solides, UMR 5613, F-21078 Dijon, France
关键词
253; Cobalt ferrite; pulsed laser deposition; reactive O-2 : N-2 atmosphere;
D O I
10.1016/j.tsf.2004.03.035
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thin films of CoFe2O4 have been fabricated by pulsed laser ablation of a metallic CoFe2 target at two different temperatures (200 and 400 degreesC) and in various O-2:N-2, 20:80 pressures [from 0.7 Pa (5 x 10(-3) Torr) up to 26.7 Pa (2 x 10(-1) Torr)]. Too low pressures resulted in an insufficient oxidation of the deposited material and an antiferromagnetic (Fe,Co)O phase is observed together with CoFe2O4. A minimum pressure of 6.7 Pa was found necessary to obtain pure CoFe2O4 films with magnetic properties close to the bulk. The higher the pressure and the temperature, the larger was the roughness of the films. The optimum deposition temperature and pressure to obtain flat (3 nm rms roughness) CoFe2O4 films were, respectively, 200 degreesC and 6.7 Pa. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:40 / 47
页数:8
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