Characterization of ordered mesoporous films on silicon (001) surface using X-ray and electron diffraction

被引：6

作者：

Liu, PH

Chao, KJ ^{[1
]}

Guo, XJ

Huang, KY

Lee, YR

Cheng, CW

Chiu, MS

Chang, SL

机构：

[1] Natl Tsing Hua Univ, Dept Chem, Hsinchu 300, Taiwan

[2] Natl Tsing Hua Univ, Dept Phys, Hsinchu 300, Taiwan

来源：

JOURNAL OF APPLIED CRYSTALLOGRAPHY | 2005年 / 38卷

关键词：

D O I：

10.1107/S0021889804031498

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A continuous silica film with well aligned mesochannels parallel to the Si( 001) surface was found to be formed through sol - gel dip-coating of a silica precursor with nonionic ethylene oxide surfactant. Two two-dimensional mesoporous structures in centered and non-centered rectangular symmetries and with the short axes of elongated ellipsoidal pores normal to the surface were observed by X-ray and electron diffraction. Detailed transmission electron microscopy investigations were employed to view the direction dependence of the channel or pore packing in the continuous film.

引用

页码：211 / 216

页数：6

共 18 条

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2-P

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