Studies of metallic multilayer structures, optical properties, and oxidation using in situ spectroscopic ellipsometry

被引:13
作者
Gao, X [1 ]
Hale, J
Heckens, S
Woollam, JA
机构
[1] Univ Nebraska, Ctr Microelect & Opt Mat Res, Lincoln, NE 68588 USA
[2] Univ Nebraska, Dept Elect Engn, Lincoln, NE 68588 USA
[3] JA Woollam Co Inc, Lincoln, NE 68508 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1998年 / 16卷 / 02期
关键词
D O I
10.1116/1.581094
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In situ spectroscopic ellipsometry (SE) has been successfully used to accurately measure sputter deposition rates and optical constants of un-oxidized metal layers and to control the growth of magnetic multilayers. The structures include [Co/Cu](n), [Co/Au](n), [Co/Ni](n), [Co/Pd](n) and [Co/Pd/ Au](n). Layer thickness precision is better than +/-0.05 nm for layer thicknesses in the range of 0.2 nm to 10 nm. Closed-loop feedback control of layer thickness is also demonstrated. Good consistency was obtained by comparing the in situ SE results to x-ray diffraction measurements. Dynamic oxidation studies of [Co/Au](n) and [Co/Ni](n) multilayer structures are also presented. (C) 1998 American Vacuum Society.
引用
收藏
页码:429 / 435
页数:7
相关论文
共 13 条
[1]  
AZZAM RMA, 1977, ELLIPSOMETRY POLARIZ, pCH4
[2]   GIANT MAGNETORESISTANCE OF (001)FE/(001) CR MAGNETIC SUPERLATTICES [J].
BAIBICH, MN ;
BROTO, JM ;
FERT, A ;
VANDAU, FN ;
PETROFF, F ;
EITENNE, P ;
CREUZET, G ;
FRIEDERICH, A ;
CHAZELAS, J .
PHYSICAL REVIEW LETTERS, 1988, 61 (21) :2472-2475
[3]   Structure and magnetism of Fe/Si multilayers grown by ion-beam sputtering [J].
Chaiken, A ;
Michel, RP ;
Wall, MA .
PHYSICAL REVIEW B, 1996, 53 (09) :5518-5529
[4]   AUTOMATIC ROTATING ELEMENT ELLIPSOMETERS - CALIBRATION, OPERATION, AND REAL-TIME APPLICATIONS [J].
COLLINS, RW .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (08) :2029-2062
[5]  
EGGELHOFF WF, 1995, J APPL PHYS, V78, P273
[6]  
IRENE EA, 1995, MRS B, V24
[7]   USE OF THE BIASED ESTIMATOR IN THE INTERPRETATION OF SPECTROSCOPIC ELLIPSOMETRY DATA [J].
JELLISON, GE .
APPLIED OPTICS, 1991, 30 (23) :3354-3360
[8]  
JOHS B, IN PRESS THIN SOLID
[9]  
Majkrzak C., 1994, Magn. Multilayers, P299
[10]  
McGahan W. A., 1989, Applied Physics Communications, V9, P1