Preparation of AlVO4-films for sensor application via a sol-gel/spin-coating technique

被引：21

作者：

Leyer, B

Schmelz, H

Gobel, H

Meixner, H

Scherg, T

Knozinger, H

机构：

[1] Univ Munich, Inst Phys Chem, D-80333 Munich, Germany

[2] Siemens AG, D-81730 Munich, Germany

来源：

THIN SOLID FILMS | 1997年 / 310卷 / 1-2期

关键词：

coatings; oxides; sensors; vanadium;

D O I：

10.1016/S0040-6090(97)00412-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The preparation of thin AlVO4 films on corundum substrates for possible sensor application is described. Thermally stable, crack-free thin films having thicknesses typically below 0.1 mu m were obtained by a sol-gel process using alkoxide reagents combined with a spin-coating technique. The films were structurally characterized by XRD, Raman and FTIR spectroscopy and their morphology was analyzed by SEM. XRD showed that the films consisted almost exclusively (> 90%) of AlVO4 after calcination at 923 K. (C) 1997 Elsevier Science S.A.

引用

页码：228 / 233

页数：6

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