Laser assisted particle removal 'dry' cleaning of critical surfaces

Laser assisted particle removal (LAPR) is a technique for removing minute particles from surfaces using an energy transfer medium condensed under and around the particles. The laser energy is absorbed in the energy transfer medium, either directly or via conduction from the substrate, explosively evaporating the condensed medium and propelling the particles off the substrate. The effect of the amount of energy transfer medium, water in this case, has been studied and a technique developed for monitoring the condensation and amount of water condensed on the substrate. (C) 1997 Elsevier Science S.A.