Uncertainty evaluation for the measurement of gauge blocks by optical interferometry

被引:63
作者
Decker, JE [1 ]
Pekelsky, JR [1 ]
机构
[1] Natl Res Council Canada, Inst Natl Measurement Stand, Ottawa, ON K1A 0R6, Canada
关键词
D O I
10.1088/0026-1394/34/6/4
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Evaluation of the uncertainty for the measurement of a gauge block by optical interferometry is presented, The measurement method which serves as the basis for the uncertainty evaluation is consistent with popular measurement techniques which apply the method of exact fractions. This uncertainty evaluation is an example of rigorous application of the ISO Guide to the Expression of Uncertainty in Measurement including treatment of higher-order terms and correlation.
引用
收藏
页码:479 / 493
页数:15
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