Analysis of grating light valves with partial surface electrodes

被引：7

作者：

Furlani, EP ^{[1
]}

Lee, EH

Luo, H

机构：

[1] Eastman Kodak Co, Imaging Res & Adv Dev Labs, Rochester, NY 14653 USA

[2] SUNY Buffalo, Dept Phys, Buffalo, NY 14260 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1998年 / 83卷 / 02期

关键词：

D O I：

10.1063/1.366752

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The grating light valve (GLV) is a micro-electromechanical reflection phase grating that operates on the electrostatic deflection of microbeams. In a conventional GLV, each beam is coated with a surface electrode that spans its length. In this paper, a GLV with partial electrode coverage is studied. An analysis is presented of the deflection profile and switching voltage for a series of electrode lengths. These results are compared with the performance of a conventional GLV. (C) 1998 American Institute of Physics. [S0021-8979(98)04102-4].

引用

页码：629 / 634

页数：6