Flexible low-voltage electro-optic polymer modulators

被引:65
作者
Song, HC [1 ]
Oh, MC
Ahn, SW
Steier, WH
Fetterman, HR
Zhang, C
机构
[1] Univ So Calif, Dept Elect Engn, Los Angeles, CA 90089 USA
[2] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA
[3] Pacific Wave Ind, Los Angeles, CA 90024 USA
关键词
D O I
10.1063/1.1586474
中图分类号
O59 [应用物理学];
学科分类号
摘要
A high-performance electro-optic (EO) polymer modulator on a flexible substrate was fabricated using a polymer substrate layer lift-off method. The SU-8 polymer has widely different adhesion properties on Si and gold substrates that makes selective lift-off possible. The flexible EO polymer modulators on a 100-mum polymer substrate layer have a V-pi of 2.6 V and extinction ratio better than 20 dB at 1550 nm. The bending loss of the flexible waveguide was unchanged at bending radii as small as 1.5 mm, and no effect on V-pi was observed for a 5 mm bending radius. (C) 2003 American Institute of Physics.
引用
收藏
页码:4432 / 4434
页数:3
相关论文
共 10 条
[1]   Demonstration of 110 GHz electro-optic polymer modulators [J].
Chen, DT ;
Fetterman, HR ;
Chen, AT ;
Steier, WH ;
Dalton, LR ;
Wang, WS ;
Shi, YQ .
APPLIED PHYSICS LETTERS, 1997, 70 (25) :3335-3337
[2]   High-frequency polymer modulators with integrated finline transitions and low Vπ [J].
Chen, DT ;
Bhattacharya, D ;
Udupa, A ;
Tsap, B ;
Fetterman, HR ;
Chen, AT ;
Lee, SS ;
Chen, JH ;
Steier, WH ;
Dalton, LR .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1999, 11 (01) :54-56
[3]   Polymeric optical waveguide films for short-distance optical interconnects [J].
Hikita, M ;
Tomaru, S ;
Enbutsu, K ;
Ooba, N ;
Yoshimura, R ;
Usui, M ;
Yoshida, T ;
Imamura, S .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 1999, 5 (05) :1237-1242
[4]   Monolithic integration of waveguide polymer electrooptic modulators on VLSI circuitry [J].
Kalluri, S ;
Ziari, M ;
Chen, AT ;
Chuyanov, V ;
Steier, WH ;
Chen, DT ;
Jalali, B ;
Fetterman, H ;
Dalton, LR .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1996, 8 (05) :644-646
[5]   PHASE-MATCHED 2ND-HARMONIC GENERATION FROM FREESTANDING PERIODICALLY STACKED POLYMER-FILMS [J].
KHANARIAN, G ;
MORTAZAVI, MA ;
EAST, AJ .
APPLIED PHYSICS LETTERS, 1993, 63 (11) :1462-1464
[6]   HIGH-FIELD POLING OF ELECTROOPTIC ETALON MODULATORS ON CMOS INTEGRATED-CIRCUITS [J].
KOWEL, ST ;
WANG, S ;
THOMSEN, A ;
CHAN, W ;
LESLIE, TM ;
WANG, NP .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1995, 7 (07) :754-756
[7]   Recent advances in electrooptic polymer modulators incorporating highly nonlinear chromophore [J].
Oh, MC ;
Zhang, H ;
Zhang, C ;
Erlig, H ;
Chang, Y ;
Tsap, B ;
Chang, D ;
Szep, A ;
Steier, WH ;
Fetterman, HR ;
Dalton, LR .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2001, 7 (05) :826-835
[8]  
SHI Y, 2002, TRENDS OPTICS PHOTON, V64
[9]  
WU LM, 1997, TECHNICAL DIGEST SER, V14, P226
[10]   Push-pull electro-optic polymer modulators with low half-wave voltage and low loss at both 1310 and 1550 nm [J].
Zhang, H ;
Oh, MC ;
Szep, A ;
Steier, WH ;
Zhang, C ;
Dalton, LR ;
Erlig, H ;
Chang, Y ;
Chang, DH ;
Fetterman, HR .
APPLIED PHYSICS LETTERS, 2001, 78 (20) :3136-3138