Surface Energy Modification by Spin-Cast, Large-Area Graphene Film for Block Copolymer Lithography

被引:120
作者
Kim, Bong Hoon [1 ]
Kim, Ju Young [1 ]
Jeong, Seong-Jun [1 ]
Hwang, Jin Ok [1 ]
Lee, Duck Hyun [1 ]
Shin, Dong Ok [1 ]
Choi, Sung-Yool [2 ]
Kim, Sang Ouk [1 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, KI Nanocentury, Taejon 305701, South Korea
[2] ETRI, Convergence Components & Mat Lab, Taejon 305701, South Korea
基金
新加坡国家研究基金会;
关键词
block copolymer; self-assembly; graphene; nanolithography; surface energy modification; OXIDE-FILMS; NANOSTRUCTURE; REDUCTION;
D O I
10.1021/nn101491g
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We demonstrate a surface energy modification method exploiting graphene film, Spin-cast, atomic layer thick, large-area reduced graphene film successfully played the role of surface energy modifier for arbitrary surfaces. The degree of reduction enabled the tuning of the surface energy. Sufficiently reduced graphene served as a neutral surface modifier to induce surface perpendicular lamellae or cylinders in a block copolymer nanotemplate. Our approach integrating large-area graphene film preparation with block copolymer lithography is potentially advantageous in creating semiconducting graphene nanoribbons and nanoporous graphene.
引用
收藏
页码:5464 / 5470
页数:7
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