Diffractive elements with novel antireflection film stacks

被引:2
作者
Elfström, H
Vallius, T
Kuittinen, M
Turunen, J
Clausnitzer, T
Kley, EB
机构
[1] Univ Joensuu, Dept Phys, FI-80101 Joensuu, Finland
[2] Univ Jena, Inst Appl Phys, D-07743 Jena, Germany
来源
OPTICS EXPRESS | 2004年 / 12卷 / 25期
关键词
D O I
10.1364/OPEX.12.006385
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Antireflection coatings fabricated between the substrate and the diffractive microstructure are shown to reduce Fresnel losses effectively, especially for high-index substrates used in the infrared region, if the diffractive structure and the antireflection stack are designed simultaneously. A substantial reduction of the Fabry-Perot effect caused by the high-index substrate is observed by using antireflection layers with films thicker than the normal quarter-wave films. (C) 2004 Optical Society of America.
引用
收藏
页码:6385 / 6390
页数:6
相关论文
共 8 条
[1]  
Dammann H., 1971, Optics Communications, V3, P312, DOI 10.1016/0030-4018(71)90095-2
[2]   Use of Fourier series in the analysis of discontinuous periodic structures [J].
Li, LF .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1996, 13 (09) :1870-1876
[3]   Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratings [J].
Li, LF .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1996, 13 (05) :1024-1035
[4]  
Macleod H. A., 1986, THIN FILM OPTICAL FI
[5]  
MOLL M, SILICON WAFER PRODUC
[6]  
Taghizadeh M. R., 1992, Optical Computing & Processing, V2, P221
[7]   Diffractive optics: Electromagnetic approach [J].
Turunen, J ;
Kuittinen, M ;
Wyrowski, F .
PROGRESS IN OPTICS, VOL XL, 2000, 40 :343-388
[8]  
TURUNEN J, 1997, DIFFRACTIVE OPTICS I