IC MEMS microtransducers

被引：13

作者：

Baltes, H

Paul, O

Korvink, JG

Schneider, M

Buhler, J

Schneeberger, N

Jaeggi, D

Malcovati, P

Hornung, M

Haberli, A

vonArx, M

Mayer, E

Funk, J

机构：

来源：

IEDM - INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST 1996 | 1996年

关键词：

D O I：

10.1109/IEDM.1996.553858

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This invited review of the merging of MEMS and IC technology includes a summary of the current technological approaches to IC MEMS, illustrations by selected IC MEMS microtransducer demonstrators, an outline of the MEMS CAD tools SOLIDIS and ICMAT, and a critical evaluation.

引用

页码：521 / 524

页数：4