Local bond breaking via STM-induced excitations: the role of temperature

被引:111
作者
Persson, BNJ [1 ]
Avouris, P [1 ]
机构
[1] IBM CORP, THOMAS J WATSON RES CTR, DIV RES, YORKTOWN HTS, NY 10598 USA
关键词
models of nonequilibrium phenomena; models of surface chemical reactions;
D O I
10.1016/S0039-6028(97)00507-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We discuss the influence of temperature on local bond breaking through multiple vibrational excitations induced by inelastic tunneling in the STM. We focus on hydrogen desorption from the H-Si(lll) and H-Si(100) systems, but the results are general. The substrate temperature affects the desorption yield in two important ways: first, lowering the temperature increases the H-Si vibrational energy relaxation time, resulting in a higher effective adsorbate temperature and an increased desorption yield. Second, lowering the substrate temperature decreases the dephasing rate of the H-Si modes (manifested by a decrease of the infrared absorption linewidth), which then reduces the rate of incoherent (Forster) vibrational energy transfer away from the Stark-shifted K-Si mode under the tip. This increases the localization of the vibrational energy and enhances the probability for multiple vibrational excitation and desorption. Finally, we discuss the possible implications of our findings on the mechanism of MOS device degradation by hot electrons. (C) 1997 Elsevier Science B.V.
引用
收藏
页码:45 / 54
页数:10
相关论文
共 34 条
[1]   Nanometer-scale lithography on Si(001) using adsorbed H as an atomic layer resist [J].
Adams, DP ;
Mayer, TM ;
Swartzentruber, BS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (03) :1642-1649
[2]   The effects of an external electric field on the adatom-surface bond: H and Al adsorbed on Si(111) [J].
Akpati, HC ;
Nordlander, P ;
Lou, L ;
Avouris, P .
SURFACE SCIENCE, 1997, 372 (1-3) :9-20
[3]   STM-induced H atom desorption from Si(100): Isotope effects and site selectivity [J].
Avouris, P ;
Walkup, RE ;
Rossi, AR ;
Shen, TC ;
Abeln, GC ;
Tucker, JR ;
Lyding, JW .
CHEMICAL PHYSICS LETTERS, 1996, 257 (1-2) :148-154
[4]   Breaking individual chemical bonds via STM-induced excitations [J].
Avouris, P ;
Walkup, RE ;
Rossi, AR ;
Akpati, HC ;
Nordlander, P ;
Shen, TC ;
Abeln, GC ;
Lyding, JW .
SURFACE SCIENCE, 1996, 363 (1-3) :368-377
[5]   ATOMIC SCALE CONVERSION OF CLEAN SI(111)-H-1X1 TO SI(111)-2X1 BY ELECTRON-STIMULATED DESORPTION [J].
BECKER, RS ;
HIGASHI, GS ;
CHABAL, YJ ;
BECKER, AJ .
PHYSICAL REVIEW LETTERS, 1990, 65 (15) :1917-1920
[6]   ATOMIC HYDROGEN-INDUCED DEGRADATION OF THIN SIO2 GATE OXIDES [J].
CARTIER, E ;
BUCHANAN, DA ;
STATHIS, JH ;
DIMARIA, DJ .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1995, 187 :244-247
[7]   MECHANISM FOR STRESS-INDUCED LEAKAGE CURRENTS IN THIN SILICON DIOXIDE FILMS [J].
DIMARIA, DJ ;
CARTIER, E .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (06) :3883-3894
[8]   DISSOCIATION OF INDIVIDUAL MOLECULES WITH ELECTRONS FROM THE TIP OF A SCANNING TUNNELING MICROSCOPE [J].
DUJARDIN, G ;
WALKUP, RE ;
AVOURIS, P .
SCIENCE, 1992, 255 (5049) :1232-1235
[9]   COUPLING OF AN ADSORBATE VIBRATION TO A SUBSTRATE SURFACE PHONON - H ON SI(111) [J].
DUMAS, P ;
CHABAL, YJ ;
HIGASHI, GS .
PHYSICAL REVIEW LETTERS, 1990, 65 (09) :1124-1127
[10]   ATOMIC SWITCH PROVES IMPORTANCE OF ELECTRON-HOLE PAIR MECHANISM IN PROCESSES ON METAL-SURFACES [J].
GAO, SW ;
PERSSON, M ;
LUNDQVIST, BI .
SOLID STATE COMMUNICATIONS, 1992, 84 (03) :271-273