Improved fabrication method for Nb/Al/AIOx/Al/Nb superconducting tunnel junctions as X-ray detectors

被引:29
作者
Sato, H
Takizawa, Y
Oontani, W
Ikeda, T
Oku, T
Otani, C
Watanabe, H
Kawai, K
Miyasaka, H
Kato, H
Shimizu, HM
Nakagawa, H
Akoh, H
Aoyagi, M
Taino, T
机构
[1] RIKEN, Inst Phys & Chem Res, Wako, Saitama 3510198, Japan
[2] Electrotech Lab, ETL, Tsukuba, Ibaraki 3058568, Japan
[3] Kyushu Univ, Dept Appl Quantum Phys & Nucl Engn, Fukuoka 8128581, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 9A期
关键词
superconducting tunnel junction; X-ray detector; high-energy resolution; fabrication technique;
D O I
10.1143/JJAP.39.5090
中图分类号
O59 [应用物理学];
学科分类号
摘要
Niobium-based superconducting tunnel junctions (STJs) with aluminum trapping layers as X-ray detectors were fabricated. We applied a fabrication technique for reducing the leakage current and improving the energy resolution for X-rays at around 6 keV. The edges of two Al layers sandwiching a tunneling barrier were oxidized by plasma discharge. The performance of these new STJs was compared with other types of STJs to which thermal oxidization in an O-2 atmosphere had been applied. The oxidization process in O-2 plasma significantly improved the energy resolution for X-rays, which reached values (FWHM) of 41 eV, 58 eV, 65 eV, and 129 eV for STJs with the size of 20 x 20 mu m(2), 100 x 100 mu m(2), 200 x 200 mu m(2), and 500 x 500 mu m(2) respectively.
引用
收藏
页码:5090 / 5094
页数:5
相关论文
共 16 条
[1]   Quasiparticle diffusion, edge losses, and back-tunneling in superconducting tunnel junctions under x-ray irradiation [J].
Cristiano, R ;
Esposito, E ;
Frunzio, L ;
Nappi, C ;
Ammendola, G ;
Parlato, L ;
Pepe, G ;
Kraus, H ;
Walko, P .
JOURNAL OF APPLIED PHYSICS, 1999, 86 (08) :4580-4587
[2]   High-resolution X-ray detectors with high-speed SQUID readout of superconducting tunnel junctions [J].
Frank, M ;
Mears, CA ;
Labov, SE ;
Azgui, F ;
Lindeman, MA ;
Hiller, LJ ;
Netel, H ;
Barfknecht, A .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1996, 370 (01) :41-43
[3]   STATISTICAL NOISE DUE TO TUNNELING IN SUPERCONDUCTING TUNNEL JUNCTION DETECTORS [J].
GOLDIE, DJ ;
BRINK, PL ;
PATEL, C ;
BOOTH, NE ;
SALMON, GL .
APPLIED PHYSICS LETTERS, 1994, 64 (23) :3169-3171
[4]  
Hettl P, 1999, X-RAY SPECTROM, V28, P309, DOI 10.1002/(SICI)1097-4539(199909/10)28:5<309::AID-XRS341>3.0.CO
[5]  
2-1
[6]   Effect of the critical current density and the junction size on the leakage current of Nb/Al-AlOx/Nb superconducting tunnel junctions for radiation detection [J].
Joosse, K ;
Nakagawa, H ;
Akoh, H ;
Takada, S ;
Maehata, K ;
Ishibashi, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (5A) :2633-2637
[7]   POSSIBILITY OF HIGH-RESOLUTION DETECTORS USING SUPERCONDUCTING TUNNEL-JUNCTIONS [J].
KURAKADO, M .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 196 (01) :275-277
[8]   ENERGY-RESOLVING SUPERCONDUCTING X-RAY-DETECTORS WITH CHARGE AMPLIFICATION DUE TO MULTIPLE QUASI-PARTICLE TUNNELING [J].
MEARS, CA ;
LABOV, SE ;
BARFKNECHT, AT .
APPLIED PHYSICS LETTERS, 1993, 63 (21) :2961-2963
[9]   Analysis of pulse shape from a high-resolution superconducting tunnel junction X-ray spectrometer [J].
Mears, CA ;
Labov, SE ;
Frank, M ;
Lindeman, MA ;
Hiller, LJ ;
Netel, H ;
Barfknecht, AT .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1996, 370 (01) :53-56
[10]   HIGH-QUALITY NB/AL-ALOX/NB JOSEPHSON JUNCTION [J].
MOROHASHI, S ;
SHINOKI, F ;
SHOJI, A ;
AOYAGI, M ;
HAYAKAWA, H .
APPLIED PHYSICS LETTERS, 1985, 46 (12) :1179-1181