High-speed focused-ion-beam patterning for guiding the growth of anodic alumina nanochannel arrays

被引：78

作者：

Liu, NW

Datta, A

Liu, CY

Wang, YL

机构：

[1] Acad Sinica, Inst Atom & Mol Sci, Taipei 106, Taiwan

[2] Natl Taiwan Univ, Dept Phys, Taipei 106, Taiwan

来源：

APPLIED PHYSICS LETTERS | 2003年 / 82卷 / 08期

关键词：

D O I：

10.1063/1.1555689

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Long-range ordered arrays of anodic alumina nanochannels are grown by anodizing an aluminum covered with a patterned layer of polymethylmethacrylate (PMMA) resist. The two-dimensional hexagonal-closed-packed pattern is created by focused ion beam (FIB) exposure of the PMMA and transferred onto the aluminum surface by phosphoric acid etching. The required exposure time per channel is only similar to20 mus, more than two orders of magnitude reduction in comparison with the previous method employing FIB direct sputtering of the aluminum surface. (C) 2003 American Institute of Physics.

引用

收藏

页码：1281 / 1283

页数：3

相关论文

共 17 条

[1] Self-organized formation of hexagonal pore arrays in anodic alumina [J].

Jessensky, O ;

Muller, F ;

Gosele, U .

APPLIED PHYSICS LETTERS, 1998, 72 (10) :1173-1175

[2] Hexagonal pore arrays with a 50-420 nm interpore distance formed by self-organization in anodic alumina [J].

Li, AP ;

Muller, F ;

Birner, A ;

Nielsch, K ;

Gosele, U .

JOURNAL OF APPLIED PHYSICS, 1998, 84 (11) :6023-6026

[3] On the growth of highly ordered pores in anodized aluminum oxide [J].

Li, FY ;

Zhang, L ;

Metzger, RM .

CHEMISTRY OF MATERIALS, 1998, 10 (09) :2470-2480

[4] New and modified anodic alumina membranes - Part III. Preparation and characterisation by gas diffusion of 5 nm pore size anodic alumina membranes [J].

Lira, HDL ;

Paterson, R .

JOURNAL OF MEMBRANE SCIENCE, 2002, 206 (1-2) :375-387

[5] Ordered anodic alumina nanochannels on focused-ion-beam-prepatterned aluminum surfaces [J].

Liu, CY ;

Datta, A ;

Wang, YL .

APPLIED PHYSICS LETTERS, 2001, 78 (01) :120-122

[6] Fabrication of gold nanodot array using anodic porous alumina as an evaporation mask [J].

Masuda, H ;

Satoh, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1996, 35 (1B) :L126-L129

[7]

Masuda H, 2001, ADV MATER, V13, P189, DOI 10.1002/1521-4095(200102)13:3<189::AID-ADMA189>3.0.CO

[8]

2-Z

[9] Photonic crystal using anodic porous alumina [J].

Masuda, H ;

Ohya, M ;

Asoh, H ;

Nakao, M ;

Nohtomi, M ;

Tamamura, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1999, 38 (12A) :L1403-L1405

[10] Photonic band gap in anodic porous alumina with extremely high aspect ratio formed in phosphoric acid solution [J].

Masuda, H ;

Ohya, M ;

Nishio, K ;

Asoh, H ;

Nakao, M ;

Nohtomi, M ;

Yokoo, A ;

Tamamura, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2000, 39 (10B) :L1039-L1041