Direct printing of gratings on sol-gel layers

被引：25

作者：

Moreau, Y

Arguel, P

Coudray, P

Etienne, P

Porque, J

Signoret, P

机构：

[1] Univ Montpellier 2, Ctr Electron & Microoptoelectron Montpellier, F-34095 Montpellier 5, France

[2] CNR, Lab Analyse & Architecture Syst, F-31077 Toulouse, France

[3] Univ Montpellier 2, Lab Analyse Interface & Nanophys, Montpellier, France

[4] Univ Montpellier 2, Labs des Verres, Montpellier, France

来源：

OPTICAL ENGINEERING | 1998年 / 37卷 / 04期

关键词：

sol-gel process; integrated optics; low-cost fabrication;

D O I：

10.1117/1.601946

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The sol-gel process is an interesting alternative for making glass integrated-optics components. Reasonable performance can be reached with low-cost fabrication. We show a one-step method for imprinting gratings on a thin layer made through the sol-gel process, thus enlarging the field of application in integrated optics to filters, out-of-plane connections, etc. The efficiency of the grating is studied through diffraction measures and computations. (C) 1998 Society of Photo-Optical Instrumentation Engineers.

引用

页码：1130 / 1135

页数：6

共 16 条

[1] ARGUEL P, 1995, THESIS U P SABATIER, P95
[2] GRATING PROFILES IN DICHROMATED GELATIN
BLAIR, LT
SOLYMAR, L
[J]. OPTICS COMMUNICATIONS, 1990, 77 (5-6) : 365 - 367
[3] Gratings fabrication by ultraviolet light imprinting and embossing in a sol-gel silica glass
Chisham, JE
Andrews, MP
Li, CY
Najafi, SI
MalekTabrizi, A
[J]. FUNCTIONAL PHOTONIC AND FIBER DEVICES, 1996, 2695 : 52 - 56
[4] UV-light imprinted sol-gel silica glass waveguide 1x8 beam splitter on silicon
Coudray, P
Chisham, J
MalekTabrizi, A
Li, CY
Andrews, M
Najafi, SI
[J]. FUNCTIONAL PHOTONIC AND FIBER DEVICES, 1996, 2695 : 92 - 97
[5] Ultraviolet light imprinted sol-gel silica glass waveguide devices on silicon
Coudray, P
Chisham, J
MalekTabrizi, A
Li, CY
Andrews, MP
Peyghambarian, N
Najafi, SI
[J]. OPTICS COMMUNICATIONS, 1996, 128 (1-3) : 19 - 22
[6] COUDRAY P, 1997, SPIE C SOL GEL POLYM, V68, P286
[7] Etienne P., 1993, THESIS U MONTPELLIER
[8] ALTERNATIVE THEORY OF DIFFRACTION BY MODULATED MEDIA
HARTHONG, J
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1991, 8 (01): : 3 - 10
[9] Impact of phase mask technique in guided wave device production
Juma, SK
Kung, P
Clark, C
[J]. INTEGRATED OPTICS DEVICES: POTENTIAL FOR COMMERCIALIZATION, 1997, 2997 : 284 - 295
[10] LI CY, 1995, INT WORKSH ADV MAT M

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