Nondestructive acoustic microcharacterisation of heteropolysiloxane thin films

被引：8

作者：

Doghmane, A ^{[1
]}

Hadjoub, Z ^{[1
]}

Hadjoub, F ^{[1
]}

机构：

[1] Univ Annaba, Inst Phys, Semicond Lab, Annaba 23000, Algeria

来源：

THIN SOLID FILMS | 1997年 / 310卷 / 1-2期

关键词：

acoustic microscopy; heteroplysiloxanes; elastic properties; thin films; acoustic velocities;

D O I：

10.1016/S0040-6090(97)00354-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Heteroplysiloxanes (HPS) thin films, recognised as a new class of materials that can be used as very versatile coating systems, are nondestructively characterised by means of a scanning acoustic microscope. The acoustic material signatures were first measured, from which the characteristic surface velocities were determined. The influence of film thicknesses as well as operating frequencies on such velocities are reported. The results are then compared with theoretical velocity dispersion curves, giving good agreements. Rayleigh velocities were found to be 3080 m/s and 3420 m/s for HPS films and glass substrates respectively. Finally using an approximation method we were able to deduce Young modulus (E = 51 GPa) and shear modulus (G = 22 GPa) for HPS films; these constants were also determined for glass substrates: E = 86 GPa and 35 GPa. (C) 1997 Elsevier Science S.A.

引用

页码：203 / 207

页数：5

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