Nano-channel on quartz-chip laboratory using single molecular detectable thermal lens microscope

被引：9

作者：

Matsumoto, K ^{[1
]}

Kawakami, T ^{[1
]}

Nakao, M ^{[1
]}

Hatamura, Y ^{[1
]}

Kitamori, T ^{[1
]}

Sawada, T ^{[1
]}

机构：

[1] Univ Tokyo, Fac Engn, Dept Engn Synth, Tokyo 113, Japan

来源：

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/MEMSYS.1998.659741

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

To execute chemical experiments with less sample volume, shorter experiment time and higher measurement resolution, the authors are developing a quartz-chip laboratory with a thermal lens microscope. However, turbulence of fluid flow causes double-count measurement error of microparticles. To increase preciseness of the measurement, a narrow lamina-flow channels called "nano-channel" is employed. Nano-channels of 50 and 900 nm width, flat-structured ball mixer and bubble pump/valve were designed and fabricated on a quartz substrate to estimate their feasibilities.

引用

页码：127 / 130

页数：4