Computational studies on the erosion process in a magnetron sputtering system with a ferromagnetic target

被引：17

作者：

Ido, S ^{[1
]}

Suzuki, T ^{[1
]}

Kashiwagi, M ^{[1
]}

机构：

[1] Saitama Univ, Fac Engn, Urawa, Saitama 338, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 3A期

关键词：

particle orbit simulation; magnetron sputtering; ferromagnetic targets; erosion process; FEM code;

D O I：

10.1143/JJAP.37.965

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The erosion process is studied using computational simulations for a magnetron sputtering system with a ferromagnetic target. The magnetic field analysis is carried our with a finite element method (FEM) code. Plasma generation and erosion are examined via the particle orbit simulations. A new model is developed to examine the erosion process in a ferromagnetic target. It is shown that the erosion profile obtained in computational studies is in good agreement with experimental results.

引用

页码：965 / 969

页数：5

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