Chemical vapour deposition diamond coated microtools for grinding, milling and drilling

被引：49

作者：

Gäbler, J

Schäer, L

Westermann, H

机构：

[1] Fraunhofer Inst Schicht & Oberflachentech, IST, Braunschweig, Germany

[2] United Hardmet GmbH, Horb Am Neckar, Germany

来源：

关键词：

applications; diamond coated tools; heated filament; micromachining;

D O I：

10.1016/S0925-9635(99)00278-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The coating of cemented carbide microtools with chemical vapour deposition (CVD) diamond is presented. The coating of the shaft tools with working dimensions between 1 and 0.05 mm in a hot-filament CVD reactor is shown. Application examples of grinding brittle materials and drilling printed circuit boards show the high performance of the new tools. A new method is presented for obtaining a rough surface without the need for thick diamond layers. This is important in manufacturing grinding tools designed for high material removal in short, economical coating processes. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：921 / 924

页数：4

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