Thermally-induced optical property changes of sputtered PdOx films

被引：26

作者：

Arai, T. ^{[1
]}

Shima, T. ^{[1
]}

Nakano, T. ^{[1
]}

Tominaga, J. ^{[1
]}

机构：

[1] AIST, CAN FOR, Tsukuba, Ibaraki 3058562, Japan

来源：

THIN SOLID FILMS | 2007年 / 515卷 / 11期

关键词：

palladium oxide; sputtering; optical properties; Raman scattering;

D O I：

10.1016/j.tsf.2006.11.040

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Optical property changes of reactively sputtered palladium oxide (PdOx) thin films during heating have been investigated by light transmission measurements and in situ Raman spectroscopy, combined with X-ray fluorescence and thermogravimetry analysis (TGA). The composition ratio and refractive index of as-deposited PdOx films varies depending on the oxygen gas-flow ratio during sputtering deposition. The transmitted light intensity at wavelengths of 405 and 635 nm measured during heating up to 1000 degrees C in air exhibits a sharp leap at 832 degrees C due to the thermal decomposition of PdO, and shows a gradual increase around 200-300 degrees C. The decomposition process of PdO is also measured by TGA as a significant weight loss of the sample. In situ Raman spectra of sputtered PdO, film obtained during heating up to 600 degrees C in air demonstrate that the crystallization of PdO starts above 200 degrees C and progresses during the whole annealing process. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：4774 / 4777

页数：4

共 41 条

[1] Quantum confinement effect in heat treated silver oxide nanoparticles [J].