Influence of IBED parameters on the composition and structure of titanium oxide films deposited on LTI-carbon

被引：23

作者：

Wang, XH ^{[1
]}

Zhang, F ^{[1
]}

Li, CR ^{[1
]}

Zheng, ZH ^{[1
]}

Chen, LH ^{[1
]}

Wang, HM ^{[1
]}

Liu, XH ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China

来源：

MATERIALS LETTERS | 2000年 / 45卷 / 01期

关键词：

IBED; titanium oxide films; LTI-carbon;

D O I：

10.1016/S0167-577X(00)00057-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The chemical composition and structure of titanium oxide films deposited on Low Temperature Isotropic Carbon (LTI-carbon) by ion beam enhanced deposition (IBED) is jointly controlled by the process parameters of IBED. In this paper, the influence of O-2 pressure, substrate temperature and ion beam energy on the composition and structure of the prepared titanium oxide films was studied by means of X-ray Photo-Electron Spectroscopy (XPS), Rutherford Backscattering Spectroscopy (RBS), X-ray Diffraction (XRD) and Glancing Angle X-ray Diffraction (GAXRD). The results show that the prepared films are polycrystalline with TiO, Ti2O3 and TiO2 as coexisting phases. The influence of O-2 pressure is mainly on the composition of the film. Ion beam energy has a great influence on the structure of the film. Neither the composition nor the structure of the film is sensitive to substrate temperature that ranged from room temperature to 300 degrees C. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：1 / 5

页数：5

共 13 条

[1] Columnar structures in polycrystalline thin films developed by competitive growth [J].

Adamik, M ;

Barna, PB ;

Tomov, I .

THIN SOLID FILMS, 1998, 317 (1-2) :64-68

[2] Growth and characterization of AP-MOCVD iron doped titanium dioxide thin films [J].

Gauthier, V ;

Bourgeois, S ;

Sibillot, P ;

Maglione, M ;

Sacilotti, M .

THIN SOLID FILMS, 1999, 340 (1-2) :175-182

[3]

HAGGAG YM, 1989, J CLIN ENG MAY, P245

[4]

Liu FY, 1998, APPL RADIAT ISOTOPES, V49, P67

[5] Surface modification of titanium based biomaterials by ion beam [J].

Liu, XH ;

Zheng, ZH ;

Zhou, ZY ;

Huang, N ;

Yang, P ;

Cai, GJ ;

Chen, YR .

JOURNAL OF BIOMATERIALS APPLICATIONS, 1996, 10 (04) :330-337

[6]

Plappert EC, 1999, CHEM VAPOR DEPOS, V5, P79, DOI 10.1002/(SICI)1521-3862(199903)5:2<79::AID-CVDE79>3.0.CO

[7]

2-M

[8] Formation of Ti/O compositional gradient film on Ti-6Al-4V alloy by reactive DC sputtering [J].

Sonoda, T ;

Kato, M .

SURFACE SCIENCE, 1998, 402 (1-3) :241-244

[9] Synthesis of TiO2 thin films by metalorganic pulsed molecular beam deposition with an oxygen-radical beam source [J].

Watanabe, S ;

Nozoye, H .

APPLIED SURFACE SCIENCE, 1998, 130 :822-827

[10]

XUE ZG, PHYSICS THIN FILM, P109

← 1 2 →