Structural, electric and kinetic parameters of ternary alloys of GeSbTe

被引:77
作者
Morales-Sánchez, E [1 ]
Prokhorov, EF [1 ]
González-Hernández, J [1 ]
Mendoza-Galván, A [1 ]
机构
[1] IPN, Ctr Invest & Estudios Avanzados, Unidad Queretaro, Juriquilla 76230, Queretaro, Mexico
关键词
amorphous materials; crystallization; electrical properties and measurements; structural properties;
D O I
10.1016/j.tsf.2004.06.141
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thin amorphous films of GeSbTe have been widely employed in the technology used for phase change optical memory or compact disks. In this article, we report on measurements of resistance, transmittance, and X-ray diffraction in thin films with stoichiometric compositions of Ge1Sb4Te7, Ge1Sb2Te4, Ge2Sb2Te5, and Ge4Sb1Te5. The resistivity, lattice constant, and the temperature at which transformation from the amorphous phase to the cubic crystalline structure occurs were calculated for each stoichiometric composition, and the energy activation was determined, applying Kissinger's model. It was found that the Ge4Sb1Te5 composition has the highest crystallization temperature (425 K), the highest resistivity (0.178 Omega cm), the greatest E-a (3.09 eV), and the lowest lattice constant (a=5.975 Angstrom) in the cubic phase at 170 degreesC. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:243 / 247
页数:5
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