Drain current DLTS of normally-off AlGaN/GaN HEMTs

被引:11
作者
Mizutani, T. [1 ,2 ]
Kawano, A. [1 ]
Kishimoto, S. [1 ,3 ]
Maeazawa, K. [1 ]
机构
[1] Nagoya Univ, Dept Quantum Engn, Furo Cho, Nagoya, Aichi 4648603, Japan
[2] Nagoya Univ, Inst Adv Res, Nagoya, Aichi 4648603, Japan
[3] Nagoya Univ, Venture Business Lab, Nagoya, Aichi 4648603, Japan
来源
PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS VOL 4, NO 4 | 2007年 / 4卷 / 04期
关键词
D O I
10.1002/pssc.200674155
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
It has been demonstrated that the drain current DLTS is effective in characterizing the transient behavior of the normally-off AlGaN/GaN HEMTs in which the conventional capacitance DLTS cannot be applied because the carriers in the channel are depleted in the normal bias condition. In the measurement, two bulk/interface-related negative peaks and one surface-state-related positive peak were observed. Drain voltage dependence was also discussed. (c) 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:1536 / +
页数:2
相关论文
共 11 条
[1]   Deep centers in n-GaN grown by reactive molecular beam epitaxy [J].
Fang, ZQ ;
Look, DC ;
Kim, W ;
Fan, Z ;
Botchkarev, A ;
Morkoc, H .
APPLIED PHYSICS LETTERS, 1998, 72 (18) :2277-2279
[2]   ANALYSIS OF DEEP LEVELS IN N-TYPE GAN BY TRANSIENT CAPACITANCE METHODS [J].
HACKE, P ;
DETCHPROHM, T ;
HIRAMATSU, K ;
SAWAKI, N ;
TADATOMO, K ;
MIYAKE, K .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (01) :304-309
[3]   Surface passivation of GaN and GaN/AlGaN heterostructures by dielectric films and its application to insulated-gate heterostructure transistors [J].
Hashizume, T ;
Ootomo, S ;
Inagaki, T ;
Hasegawa, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (04) :1828-1838
[4]   EFFECTS OF COLUMN-III ALKYL SOURCES ON DEEP LEVELS IN GAN GROWN BY ORGANOMETALLIC VAPOR-PHASE EPITAXY [J].
LEE, WI ;
HUANG, TC ;
GUO, JD ;
FENG, MS .
APPLIED PHYSICS LETTERS, 1995, 67 (12) :1721-1723
[5]  
MAKIHARA H, 2001, I PHYS C SER, V170, P113
[6]   Drain current DLTS of AlGaN/GaN HEMTs [J].
Mizutani, T ;
Okino, T ;
Kawada, K ;
Ohno, Y ;
Kishimoto, S ;
Maezawa, K .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2003, 200 (01) :195-198
[7]   A study on current collapse in AlGaN/GaN HEMTs induced by bias stress [J].
Mizutani, T ;
Ohno, Y ;
Akita, M ;
Kishimoto, S ;
Maezawa, K .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2003, 50 (10) :2015-2020
[8]   Measurement of frequency dispersion of AlGaN/GaN high electron mobility transistors [J].
Mizutani, T ;
Makihara, H ;
Akita, M ;
Ohno, Y ;
Kishimoto, S ;
Maezawa, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (2A) :424-425
[9]   DRAIN CURRENT DLTS STUDY OF AN ALGAAS/GAAS MISFET [J].
SHIMIZU, N ;
MIZUTANI, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (09) :L1502-L1504
[10]   The impact of surface states on the DC and RF characteristics of A1GaN/GaN HFETs [J].
Vetury, R ;
Zhang, NQQ ;
Keller, S ;
Mishra, UK .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2001, 48 (03) :560-566