Spatially resolved measurements of HTS microwave surface impedance

We present a novel technique for the characterisation of microwave properties of HTS films which allows the spatial variation of this important physical parameter to be measured. The method employs a dielectric puck system which can be moved over the surface of a large wafer, sampling the surface impedance at a number of discrete frequencies between 5 and 15 GHz. The surface impedance can also be rapidly measured as a function of microwave magnetic field strength. Spatial resolution in this case is as small as 3 mm.