Low-temperature field emission system for development of ultracoherent electron beams

被引:9
作者
Cho, B
Ogawa, T
Ichimura, T
Ichinokawa, T
Amakusa, T
Oshima, C
机构
[1] Waseda Univ, Kagami Mem Lab Mat Sci & Technol, Shinjuku Ku, Tokyo 1690051, Japan
[2] Waseda Univ, Dept Appl Phys, Shinjuku Ku, Tokyo 169, Japan
[3] JEOL Ltd, Tokyo 1968558, Japan
关键词
D O I
10.1063/1.1790581
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Here, we present the design and test-operation performance of a low-temperature field emission (FE) system which can be employed to image and characterize the FE beam from low-temperature tips. Three radiation shields cooled by liquid helium and liquid nitrogen cryostats surround the FE tips and anodes completely. Once the FE system is cooled down to 5 K, experiments can run for more than 15 h without interruption. The design allows not only for the exchange of tips and anodes by load-lock equipment but also for the adjustment of tip-anode distance using a piezo-tube. Test runs in projection microscopy mode have presented clear diffraction-fringe patterns near the shadows of nano objects at temperatures from room temperature to 5.5 K, indicating that the system is well suited for the investigation of the coherence of electron beam from FE tip. (C) 2004 American Institute of Physics.
引用
收藏
页码:3091 / 3096
页数:6
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