Compensating electrostatic forces by single-scan Kelvin probe force microscopy

We describe a novel method of single-scan Kelvin probe force microscopy, operating simultaneously with amplitude-modulation distance control in ambient air. A separate Kelvin probe feedback control loop compensates for potential differences between tip and sample by minimizing electrostatic forces. As a result, electrostatically induced height errors in topography are automatically cancelled. To prevent crosstalk from topography or errors in distance control, the Kelvin probe feedback employs phase information resulting from a combination of mechanical and electrical excitation of the cantilever at its second flexural eigenmode. The feedback for amplitude-modulation distance control operates as usual close to the first eigenfrequency.