Spectroscopic study of a stationary surface-wave sustained argon plasma column at atmospheric pressure

被引:64
作者
García, MC [1 ]
Rodero, A [1 ]
Sola, A [1 ]
Gamero, A [1 ]
机构
[1] Univ Cordoba, Dept Fis, E-14071 Cordoba, Spain
关键词
surface-wave plasma; plasma temperature; Saha equilibrium;
D O I
10.1016/S0584-8547(00)00279-2
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
A spectroscopic study of an argon surface wave plasma column at atmospheric pressure under steady-state conditions shows that we are dealing with a two-temperature (2T) discharge whose excitation kinetics are controlled by electron collisions (electron excitation kinetic plasma). A partial local Saha equilibrium in the excitation space is reached from which the 4s and 4p levels are excluded. The absorbed high frequency (HF) power per electron for the maintenance of the discharge (the parameter theta) was found to be a magnitude increasing with the electron density, contrary to what occurs at low pressure. Modifying the work conditions, such as gas flow and HF power, we obtained plasmas that are similar in structure when the end of the plasma is used as a reference position. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1733 / 1745
页数:13
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