Diamond-like carbon protective films for organic photoconductors

被引：16

作者：

Chan Y.C. ^{[1
]}

Miao X.S. ^{[1
]}

He X.M. ^{[1
,2
]}

Lee S.T. ^{[1
,2
]}

机构：

[1] Department of Electronic Engineering, City University of Hong Kong

[2] Dept. of Phys. and Materials Science, City University of Hong Kong

来源：

Journal of Electronic Materials | 1998年 / 27卷 / 1期

关键词：

Diamond-like carbon film; Electrophotographic properties; Hardness; Organic photoconductor;

D O I：

10.1007/s11664-998-0335-5

中图分类号：

学科分类号：

摘要：

The deposition of a protective film to increase the hardness of an organic photoconductor (OPC) surface is an effective method of lengthening the lifetime of the OPC. In this work, diamond-like carbon (DLC) protective films were deposited onto OPC samples by the electron cyclotron resonance (ECR)-microwave plasma chemical vapor deposition (MPCVD) method with low substrate temperature. The DLC films were deposited with optimized deposition conditions and exhibited high transmissivity and high electrical resistivity. The films caused a remarkable increase in the hardness of the OPC surface, by a factor of 2.5∼5.4. The acceptance voltage, dark decay rate, photodischarge rate, and contrast potential of the OPC protected by DLC film were improved. These results show DLC is a suitable protective film for OPC.

引用

页码：41 / 43

页数：2

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