A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy

被引:183
作者
Ioannis Chasiotis
Wolfgang G. Knauss
机构
[1] University of Virginia,Mechanical and Aerospace Engineering
[2] California Institute of Technology,Graduate Aeronautical Laboratories
关键词
Mechanical properties; microtensile testing; AFM; digital image correlation; MEMS;
D O I
10.1007/BF02411051
中图分类号
学科分类号
摘要
An apparatus has been designed and implemented to measure the elastic tensile properties (Young's modulus and tensile strength) of surface micromachined polysilicon specimens. The tensile specimens are “dog-bone” shaped ending in a large “paddle” for convenient electrostatic or, in the improved apparatus, ultraviolet (UV) light curable adhesive gripping deposited with electrostatically controlled manipulation. The typical test section of the specimens is 400 μm long with 2 μm×50 μm cross section. The new device supports a nanomechanics method developed in our laboratory to acquire surface topologies of deforming specimens by means of Atomic Force Microscopy (AFM) to determine (fields of) strains via Digital Image Correlation (DIC). With this tool, high strength or non-linearly behaving materials can be tested under different environmental conditions by measuring the strains directly on the surface of the film with nanometer resolution.
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页码:51 / 57
页数:6
相关论文
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