Effect of acetylene flow rate on morphology and structure of carbon nanotube thick films grown by thermal chemical vapor deposition

被引：10

作者：

Cao Z. ^{[1
]}

Sun Z. ^{[2
]}

Guo P. ^{[2
]}

Chen Y. ^{[2
]}

机构：

[1] Research and Development Centre of Flat Panel Display Technology, SVA Electron Co. Ltd.

[2] Nanotech Center, East China Normal University

来源：

Frontiers of Materials Science in China | 2007年 / 1卷 / 1期

关键词：

Carbon nanotubes; Chemical vapor deposition; Raman spectra; Scanning electron microscopy; Transmitting electron microscopy;

D O I：

10.1007/s11706-007-0017-x

中图分类号：

学科分类号：

摘要：

Carbon nanotube (CNT) films were grown on nickel foil substrates by thermal chemical vapor deposition (CVD) with acetylene and hydrogen as the precursors. The morphology and structure of CNTs depending on the acetylene flow rate were characterized by a scanning electron microscope (SEM), a transmission electron microscope (TEM) and a Raman spectrometer, respectively. The effect of acetylene flow rate on the morphology and structure of CNT films was investigated. By increasing the acetylene flow rate from 10 to 90 sccm (standard cubic centimeter per minute), the yield and the diameter of CNTs increase. Also, the defects and amorphous phase in CNT films increase with increasing acetylene flow rate. © Higher Education Press 2007.

引用

页码：92 / 96

页数：4

共 19 条

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