Growth of Large-Area Single- and Bi-Layer Graphene by Controlled Carbon Precipitation on Polycrystalline Ni Surfaces

被引:424
作者
Reina, Alfonso [2 ]
Thiele, Stefan [3 ,4 ]
Jia, Xiaoting [2 ]
Bhaviripudi, Sreekar [1 ]
Dresselhaus, Mildred S. [1 ,5 ]
Schaefer, Juergen A. [3 ,4 ]
Kong, Jing [1 ]
机构
[1] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA
[2] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
[3] Tech Univ Ilmenau, Inst Phys, D-98684 Ilmenau, Germany
[4] Tech Univ Ilmenau, Inst Mikro & Nanotechnol, D-98684 Ilmenau, Germany
[5] MIT, Dept Phys, Cambridge, MA 02139 USA
基金
美国国家科学基金会;
关键词
Graphene; chemical vapor deposition; nickel catalyst; carbon nanomaterials; CHEMICAL-VAPOR-DEPOSITION; FEW-LAYER GRAPHENE; EPITAXIAL GRAPHENE; GRAIN-GROWTH; THIN-FILMS; GRAPHITE; SEGREGATION; KINETICS; NUCLEATION; NANOSHEETS;
D O I
10.1007/s12274-009-9059-y
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We report graphene films composed mostly of one or two layers of graphene grown by controlled carbon precipitation on the surface of polycrystalline Ni thin films during atmospheric chemical vapor deposition (CVD). Controlling both the methane concentration during CVD and the substrate cooling rate during graphene growth can significantly improve the thickness uniformity. As a result, one- or two- layer graphene regions occupy up to 87% of the film area. Single layer coverage accounts for 5%-11% of the overall film. These regions expand across multiple grain boundaries of the underlying polycrystalline Ni film. The number density of sites with multilayer graphene/graphite (>2 layers) is reduced as the cooling rate decreases. These films can also be transferred to other substrates and their sizes are only limited by the sizes of the Ni film and the CVD chamber. Here, we demonstrate the formation of films as large as 1 in(2). These findings represent an important step towards the fabrication of large-scale high-quality graphene samples.
引用
收藏
页码:509 / 516
页数:8
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